| 摘要 |
<p>PURPOSE:To provide a table device which is compact and small in Z-direction height at a small cost increase, and capable of setting Z direction position and tilt degree of the specimen table independently without complicating the control system and mechanism. CONSTITUTION:A table device is constituted of a base 1, an intermediate part 2 supported movement-free linearly to it, a drive means 10 to displace the intermediate part 2, slanting stages 3 fixed to the intermediate part 2, a table 5 supported movably with a plurality of elastic support means, three roller support mechanisms 6 fixed to the table 5, three rollers 1 contacting the slanting surface of each three slanting stages 3. At least two of the three rollers 7 have center shafts eccentric to the roller center. This eccentric shaft is supported rotation- free with the roller support mechanism 6 and the table device can be positioned at an arbitrary rotational angle with a rotation drive device 9 fixed to the roller support mechanism 6.</p> |
