Koordinatentisch

摘要

In an x-, y-coordinate table (12), for compensating z-positional fluctuations of a table element (76), which fluctuations can be traced back to linearity deviations of the guiding devices, provision is made of piezoelectric actuators (22-1, etc.; 60-1, etc.), which are activated in each case by a control loop which operates in each case as a function of a positional transmitter (50 and 82, respectively), which is supported on a baseplate (20 and 38, respectively) of the respective guide and runs with its movable measuring part (54; 86) on a reference surface (56; 88), which is designed on the movable part of the respective guiding device.