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发明名称
MISFET-ANORDNUNG MIT ABMESSUNGEN IM SUBMIKROMETERBEREICH UND BESEITIGUNG DER HEISSEN LADUNGSTRÄGER.
摘要
申请公布号
DE69020160(D1)
申请公布日期
1995.07.20
申请号
DE19906020160
申请日期
1990.09.19
申请人
BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM, AUSTIN, TEX., US
发明人
TASCH, ALOYSIOUS, FELIX, JR., AUSTIN, TX 78703, US;SHIN, HYUNGSOON, AUSTIN, TX 78703, US;MAZIAR, CHRISTINE, MARIE, AUSTIN, TX 78750, US
分类号
H01L21/336;H01L21/338;H01L29/08;H01L29/78;H01L29/812;(IPC1-7):H01L29/772
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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