| 摘要 |
<p>PURPOSE: To obtain a single board vacuum fluorescent display tube which is simply manufactured at low cost by using triode light emitting element constructed by laminating a light emitting material layer on an anode, a grid and an emitter each other at some intervals, on a support substrate. CONSTITUTION: The first conductive material layer 12 is formed by ITO, etc., on a support substrate 10 made of glass, etc., further, the first insulating layer 15 of SiO2 or glass, etc., the second conductive material layer 16 of a metal or a high-density injection semiconductor, etc., the second insulating layer 19 of the same material as that of the layer 15 and lastly an electron emission layer 20 made of a diamond, etc., are one after another at each of prescribed thickness. Next, pattern formation and etching by photolithography are performed and an element is formed. The element operates as a triode where an operating time layer 12 is an anode, a layer 16 is a grid, and a layer 20 is an emitter. Then, fluophor powder commercially available at a low price is settled on the exposed surface of the layer 12 from a wetting solution, and a luminous layer 30 is formed.</p> |
