| 摘要 |
<p>PURPOSE:To easily convert the pitch of substrate arrangement with a simple structure by moving a group of substrates retained at a plurality of retention grooves along each groove. CONSTITUTION:First, a group of substrates arranged in a standard pitch P are placed at the retention groove of a first retention part 43 on a substrate retention tool 40. Then, the substrate retention tool 40 is moved in horizontal direction by a half pitch P72 and then a group of substrates arranged in the standard pitch are placed at an intermediate retention groove 46 formed at a second retention part 44 on the substrate retention tool 40. Then, a drive motor 52 is driven and a worm shaft 51 is rotated, thus rotating a worm wheel 50 clockwise. Then, a group of substrates being retained at the retention groove of the first retention part 43 move to the side of the second retention part 44 along the retention groove and each substrate is inserted between adjacent substrates of a group of substrates arranged with a standard pitch at an intermediate retention groove. In this state, the substrates were arranged at a half pitch P/2 at the second retention part 44.</p> |
