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发明名称
DEVICE FOR PRECISION DISPLACEMENTS
摘要
申请公布号
RU1464884(C)
申请公布日期
1995.07.20
申请号
SU19874271772
申请日期
1987.06.30
申请人
TSENTRALNYJ NAUCHNO-ISSLEDOVATELSKIJ TEKHNOLOGICHESKIJ INSTITUT
发明人
BEZRUK A.I.;SHARYGIN M.YA.
分类号
H01L41/12;H02N2/00;(IPC1-7):H02N2/00
主分类号
H01L41/12
代理机构
代理人
主权项
地址
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