发明名称 |
Single crystal pulling apparatus and method. |
摘要 |
<p>The present invention relates to apparatus for the pulling of single crystals from polycrystalline solutions, the apparatus comprising a chamber containing a controlled, vertically displaceable crucible containing molten polycrystalline liquid, preferably silicon, and a heater surrounding the crucible, a single crystal being obtainable from the liquid by pull means adapted to immerse a seed crystal in the liquid and pull up the single crystal, characterised in that the heater is vertically displaceable by controlled drive means so as to overcome the problem of maintaining uniform oxygen concentration in the crystal.</p> |
申请公布号 |
EP0400995(B1) |
申请公布日期 |
1995.07.19 |
申请号 |
EP19900305887 |
申请日期 |
1990.05.30 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY LIMITED |
发明人 |
KATSUOKA, NOBUO;MIZUISHI, KOJI;FURUSE, SHINICHI, 89-2 AZA-HARANAKA;MAEDA, SHIGEMARU |
分类号 |
C30B15/30;C30B15/14;H01L21/208;(IPC1-7):C30B15/14 |
主分类号 |
C30B15/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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