发明名称
摘要 A method for manufacturing semiconductor devices according to this invention, comprises the wafer manufacturing step of forming an integrated circuit with a redundant circuit in each of a plurality of chip areas on a semiconductor wafer and also forming at least one stress testing terminal that applies a stress testing voltage or stress testing signal to the interconnections other than those for power supply in the integrated circuit for each of the chip areas or for every certain number of the chip areas, the step of, after the wafer manufacturing step, screening failures by applying a specified stress testing control signal or stress voltage to a certain number of chip areas with the stress testing terminal in contact with a contact terminal of a tester in the wafer state, the step of, after the screening step, judging whether or not the electrical characteristics of each chip area are acceptable through die sort test, the step of remedying an integrated circuit in a chip area judged to be defective in the judging step, by means of the redundant circuit, and the assembly step of, after the remedying step, separating the chip areas into individual elements and then assembling them into an integrated circuit device.
申请公布号 JPH0766935(B2) 申请公布日期 1995.07.19
申请号 JP19910344238 申请日期 1991.12.26
申请人 发明人
分类号 H01L21/66;G01R31/28;G01R31/30;G06F11/20;G11C11/401;H01L21/82;H01L21/822;H01L27/04;(IPC1-7):H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址