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发明名称
VACUUM FILM FORMING DEVICE
摘要
申请公布号
JPH07180054(A)
申请公布日期
1995.07.18
申请号
JP19930325388
申请日期
1993.12.22
申请人
TOSHIBA CORP;TOSHIBA ELECTRON ENG CORP
发明人
IIDA YOSHIYUKI;HIRATA NORIYUKI
分类号
C23C14/50;(IPC1-7):C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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