发明名称 Reworkable high density interconnect structure incorporating a release layer
摘要 A multichip module (incorporating a high density interconnect structure) has: a first portion containing a substrate with semiconductor chips therein, with each chip having contact pads; a second portion comprising a (HDI) structure interconnecting the chip pads; and a solvent-soluble release layer bonding the two portions together and allowing for easy removal of the HDI structure from the substrate of the module by immersion in an appropriate solvent for the release layer.
申请公布号 US5434751(A) 申请公布日期 1995.07.18
申请号 US19940225876 申请日期 1994.04.11
申请人 MARTIN MARIETTA CORPORATION 发明人 COLE, JR., HERBERT S.;SITNIK-NIETERS, THERESA A.;WOJNAROWSKI, ROBERT J.;LUPINSKI, JOHN H.
分类号 H01L21/48;H01L23/538;H05K1/00;(IPC1-7):H05K1/11 主分类号 H01L21/48
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