发明名称 Method of producing semiconductor substrate
摘要 The present invention relates to a method of producing a semiconductor substrate which is suitable for an electronic device or an integrated circuit in the form of dielectric separation or having a single crystal semiconductor layer formed on an insulator. The method comprises the steps of making a silicon substrate porous, forming a silicon single crystal on the porous substrate and oxidizing the porous silicon substrate to form a semiconductor layer having good crystallinity on an insulating support, particularly a support having light transmission.
申请公布号 US5433168(A) 申请公布日期 1995.07.18
申请号 US19930061509 申请日期 1993.05.14
申请人 CANON KABUSHIKI KAISHA 发明人 YONEHARA, TAKEO
分类号 H01L21/20;H01L21/02;H01L21/306;H01L21/76;H01L21/762;H01L27/12;(IPC1-7):C30B25/02 主分类号 H01L21/20
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