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发明名称
SEALING MECHANISM FOR VACUUM FILM FORMING DEVICE
摘要
申请公布号
JPH07180027(A)
申请公布日期
1995.07.18
申请号
JP19930328002
申请日期
1993.12.24
申请人
KOBE STEEL LTD
发明人
HANAGURI KOUJI;NOMURA HOMARE
分类号
C23C14/00;(IPC1-7):C23C14/00
主分类号
C23C14/00
代理机构
代理人
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地址
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