| 摘要 |
<p>PURPOSE:To prevent the electrification on a wafer by irradiation with ions by freely vertically movably disposing electrically conducting pins in contact with the rear surface of this wafer. CONSTITUTION:This wafer holder is composed of a base 4 for supporting the wafer 2, a rubber-like elastic material 6 disposed on the surface of the wafer 2 supporting region of this base and an annular clamper 8 for pressing the circumferential edge of the wafer 2 toward a base 4. This rubber-like elastic material 6 is provided with plural through holes 6a. The pins 22 of which the front ends project to the upper surface of the rubber-like elastic material 6 through the through holes 6a at the time of rising are freely vertically movably disposed in the lower part of the respective through holes 6a of the rubber-like elastic material 6 in the base 4. Further, springs 24 which elastically push up the respective pins 22 and electrically conduct the pins 22 to the base 4 are, fitted. All these pins 22 and springs 24 are formed of electrical conductors.</p> |
