COLLIMATION CHAMBER FITTED WITH TURNABLE PEDESTAL,申请号JP19940126424-传众专利搜索

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发明名称	COLLIMATION CHAMBER FITTED WITH TURNABLE PEDESTAL
摘要
申请公布号	JPH07180050(A)	申请公布日期	1995.07.18
申请号	JP19940126424	申请日期	1994.06.08
申请人	APPLIED MATERIALS INC	发明人	ABUI TETSUPUMAN
分类号	C23C14/34;C23C14/50;H01J37/32;H01J37/34;H01L21/02;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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