Arc source macroparticle filter

摘要

PCT No. PCT/AU92/00125 Sec. 371 Date Jan. 19, 1994 Sec. 102(e) Date Jan. 19, 1994 PCT Filed Mar. 25, 1992 PCT Pub. No. WO92/16959 PCT Pub. Date Oct. 1, 1992.An arc source macroparticle filter (1) includes a circular cathode (2) for emitting particles and an extended cylindrical anode (3) adjacent to and co-axial with the cathode for accelerating the emitted particles. Toroids (4) generate a magnetic field to define a continuous non-linear plasma duct (5) for directing charged particles and separating therefrom undesirable larger particles. The duct is minimally non-linear to permit high rates of charged particle transmission. Arc source filter (1) allows heating and/or the deposition of a variety of surface coatings to a workpiece (8).