| 摘要 |
PURPOSE:To execute hot processing with high speed even with a broad work piece and to deal with a large-output laser beam as well. CONSTITUTION:A polygon mirror 13 reflects the laser beam from a laser oscillator 11 to a prescribed angle range. A reflection mirror 15 receives and reflects the laser beam reflected from the polygon mirror 13. The reflection surface 15a of this reflection mirror 15 is formed to a cylindrical shape and has a light condensing axis 15b paralleled to the reflection surface 15a. The polygon mirror 13 is so arranged that the reflection position of the laser beam exists on the light condensing axis 15b of the reflection mirror 15. The reflection mirror 15 has a characteristic to condense parallel rays of light which pass the light condensing axis 15b, are made incident thereon and move along its diametral direction onto the prescribed line orthogonal with the light condensing optical axis 15b. Then, the work piece 16 is arranged on such prescribed plane, by which the work piece is irradiated in a condensed state with the laser beam and is thermally processed. |
