| 摘要 |
PURPOSE:To obtain a pellicle capable of preventing the contamination of a mask substrate and the deposition of foreign matter by forming an adhesive to fix a pellicle frame to the mask substrate only with an adhesive layer. CONSTITUTION:An adhesive 3 consists of a double coated tape 3c consisting of two adhesive layers having a different adhesive strength, e.g. a strong adhesive layer 3a on the pellicle frame 1 side and a weak adhesive layer 3b on the mask substrate 4 side. Consequently, the weak adhesive layer 3b is weak enough so that a pellicle is not released from the substrate 4 when handled but the pellicle is easily released from the substrate 4, the adhesive 3 and its paste are not left on the bonding surfaces, and the adhesive 3 is not left on the substrate as foreign matter. |
