WASHING DEVICE AND WASHING METHOD,申请号JP19940182982-传众专利搜索

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发明名称	WASHING DEVICE AND WASHING METHOD
摘要
申请公布号	JPH07176509(A)	申请公布日期	1995.07.14
申请号	JP19940182982	申请日期	1994.07.11
申请人	TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK	发明人	YOKOMIZO KENJI;TANAKA YUJI;KITAHARA SHIGENORI
分类号	H01L21/304;B08B3/08;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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