MANUFACTURE OF SEMICONDUCTOR AND COOLING GAS INTRODUCING AND EXHAUSTING METHOD USING THE SAME,申请号JP19930317853-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR AND COOLING GAS INTRODUCING AND EXHAUSTING METHOD USING THE SAME
摘要
申请公布号	JPH07176486(A)	申请公布日期	1995.07.14
申请号	JP19930317853	申请日期	1993.12.17
申请人	SUMITOMO METAL IND LTD	发明人	TAMOTO KAZUHIRO
分类号	H05H1/46;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/205;H01L21/306	主分类号	H05H1/46
代理机构		代理人
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地址

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