| 摘要 |
<p>PURPOSE:To prevent discharge by covering the periphery of a part for feeding a voltage externally to an electrode with a silicone resin. CONSTITUTION:The electrostatic chuck has such structure as an electrode 1 is coated, on the opposite sides thereof, with a dielectric layer 2 composed of a sintered or sprayed ceramics. The electrode 1 is provided with a part 3 for feeding a voltage externally coated, on the periphery thereof, with a silicone resin 4. A rubber-like or a varnish-like silicone resin 4 may be employed and a silicone rubber is employed preferably in view point of low coefficient of thermal expansion. A single liquid or double liquid room temperature curing silicone rubber is preferably employed. This structure absorbs stress caused by the difference in the coefficient of thermal expansion and enhances the withstand voltage to eliminate the discharge phenomenon.</p> |
