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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH07176518(A)
申请公布日期
1995.07.14
申请号
JP19930317854
申请日期
1993.12.17
申请人
SUMITOMO METAL IND LTD
发明人
OZAKI AKINORI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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