| 摘要 |
<p>PURPOSE:To monitor a decrease in an exhaust amount of an exhaust unit. CONSTITUTION:A board edge cleaning apparatus is an apparatus for dissolving and removing an unnecessary thin film adhered to an edge of a rectangular board 1, and comprises a board holder, solvent discharge nozzles 32, 36, an exhaust block 16, a negative pressure measuring port 24 and a horizontally moving mechanism. The holder holds the board 1. The nozzles 32, 36 discharge solvents to the edge of the board 1 held by the holder. The block 16 sucks a matter dissolved by the solvent by negative pressure and exhausts it. The negative pressure measuring port 24 is mounted at an upper end of the block 16 and connected to a manometer for measuring the negative pressure in the block 16. The mechanism linearly relatively moves the nozzles 32, 36 and the block 16 to the holder thereby to move the nozzles 32, 36 along the edge of the board 1.</p> |
