| 摘要 |
<p>PURPOSE: To change a thermal conductivity between targets speedily by forming a gap between two adjacent targets and controlling the pressure of a gas that is filled into the gap. CONSTITUTION: A gas gap 64 is connected to a pressure control mechanism 75 by a path 76. The temperature of a pedestal 62 is detected by a temperature sensor 63. The temperature sensor 63 sends a signal to a temperature controller 69, and then the temperature controller sends a control signal that is in a certain relationship with the detected temperature to a pressure control mechanism 75 via a line 85. As a gas pressure in the gap 64 increases, a heat conduction in the gap 64 further increases. On the other hand, when the gas pressure in the gap 64 decreases, the heat conduction in the gap 64 further decreases. This sort of pressure change due to the detected temperature causes the temperature change of a pedestal to change according to the control signal, thus accurately controlling the temperature of the pedestal.</p> |
