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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND TESTING METHOD FOR THE SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH07174823(A)
申请公布日期
1995.07.14
申请号
JP19930321990
申请日期
1993.12.21
申请人
KAWASAKI STEEL CORP
发明人
KONDOU HISASHI
分类号
G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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SEMICONDUCTOR DEVICE
