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经营范围
发明名称
Verfahren zur Schichtdickenmessung an Leitern und Halbleitern
摘要
申请公布号
DD274662(B5)
申请公布日期
1995.07.13
申请号
DD19880318718
申请日期
1988.08.05
申请人
HERRMANN, DIETHARD, DOZ, DR.SC.NAT;FUKAREK, WOLFGANG, DIPL.-PHYS.DR
发明人
HERRMANN, DIETHARD, DOZ, DR.SC.NAT;FUKAREK, WOLFGANG, DIPL.-PHYS.DR
分类号
G01B7/06;G01B21/08;(IPC1-7):G01B7/06
主分类号
G01B7/06
代理机构
代理人
主权项
地址
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