| 摘要 |
A coating of TiO2 is produced by simultaneously spraying a stream of TiCl4 in O2 and a stream of H2O in an inert gas on to a heated surface, the stream of TiCl4 surrounding the stream of H2O. The temperature of the surface may be 150-250 DEG C. and the distance between it and the spray nozzle may be 1-10 cms. The streams may be formed by contacting O2 with the surface of liquid TiCl4, optionally diluted with HCl, and by bubbling the inert gas, e.g. Ar, through H2O, both liquids being at 25 DEG C. The surface may be a crystalline semi-conductor, e.g. Si, or a conductive or semi-conductive film on an insulating carrier, e.g. of glass. The TiO2 film is dielectric, and has a resistivity > 1010 ohms. cm. |
