Interchangeable CVD chuck surface

摘要

A chuck in a coating chamber in a CVD system has a hearth for providing heat to a substrate and an interchangeable chuck surface mounted on the hearth for supporting a substrate to be coated during processing. In preferred embodiment there are a plurality of chucks in a system. Excessive coating on surfaces in the CVD chamber other than substrate surfaces to be coated is substantially removed periodically by venting the chamber and replacing the interchangeable chuck faces. Also in a preferred embodiment, an interlocking feature operable by temperature is provided to secure the chuck faces during operation and to release them for interchanging. Also in a preferred embodiment heat transfer between the hearth and the chuck is enhanced by rings and grooves that increase surface area for heat transfer.