| 摘要 |
PURPOSE:To increase a throughput per catalytic unit volume and thereby, make use of a catalyst possible at an extensive range of gas flow velocity by activating a reducible metallic catalyst under the effects of volatile hydrocarbon or alcohol at a specific temperature, and allowing the activated reducible metallic catalyst to come into contact with gas containing nitrogen trifluoride at ordinary temperature. CONSTITUTION:A reducible metallic catalyst contains metal, a metal oxide and a metal hydroxide as effective substances, and the metal elements to be used are Cu, Ni, Fe, Zn, Cr, etc. This reducible metallic catalyst is activated by causing volatile hydrocarbon (e.g. methane) or alcohol to act upon the catalyst at 300 to 1000 deg.C, and the activated reducible metallic catalyst is allowed to come into contact with the gas containing nitrogen trifluoride at ordinary temperature. Consequently, NF3 can be decomposed without adding hydrogen. In addition, the removal process can be performed at ordinary temperature, so that the whole harmful substance removal device is simplified. Further, the throughput per catalytic unit volume is high and a harmful nitrogen oxide is removed, so that the catalyst can be used at an extensive range of gas flow velocity. |
