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发明名称
APPARATUS FOR PULLING UP SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPH07172974(A)
申请公布日期
1995.07.11
申请号
JP19930318160
申请日期
1993.12.17
申请人
TOSHIBA CORP
发明人
HOSOKI YOSHISATO
分类号
C30B15/02;C30B15/10;H01L21/208;(IPC1-7):C30B15/02
主分类号
C30B15/02
代理机构
代理人
主权项
地址
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