| 摘要 |
PURPOSE:To obtain a coated multilayer article having excellent heat-resistance, corrosion resistance and chemical stability by forming a graphite layer on a surface of a substrate made of boron nitride, smoothing the obtained multilayer article to a smoothness higher than a specific level and forming a heat-decomposed boron nitride coating layer on the smoothed surface. CONSTITUTION:This multilayer formed article coated with a heat-decomposed baron nitride is produced by forming a graphite layer on a surface of a boron nitride substrate by CVD process, smoothing the surface of the obtained multilayer article to a maximum peak height of <=200mum or to a chamfered curvature radius of the corner of the peak and valley of >=0.5mm to lessen the concentration of the internal stress and forming a heat-decomposed boron nitride film on the smoothed surface by a CVD apparatus. |
