发明名称 Method of forming optical light guides through silicon
摘要 A method of forming optical light guides through silicon is disclosed wherein such light guides extend from a first (or front) surface along a preferred crystallographic direction to a second (or back) surface.
申请公布号 US5431775(A) 申请公布日期 1995.07.11
申请号 US19940282677 申请日期 1994.07.29
申请人 EASTMAN KODAK COMPANY 发明人 PRINCE, ERIC T.
分类号 G02B6/12;G02B6/122;G02B6/136;(IPC1-7):H01L21/302 主分类号 G02B6/12
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