发明名称 |
Method of forming optical light guides through silicon |
摘要 |
A method of forming optical light guides through silicon is disclosed wherein such light guides extend from a first (or front) surface along a preferred crystallographic direction to a second (or back) surface.
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申请公布号 |
US5431775(A) |
申请公布日期 |
1995.07.11 |
申请号 |
US19940282677 |
申请日期 |
1994.07.29 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
PRINCE, ERIC T. |
分类号 |
G02B6/12;G02B6/122;G02B6/136;(IPC1-7):H01L21/302 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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