发明名称 |
MIM-type electric device production thereof, and electronic apparatus employing the device |
摘要 |
An MIM type electric element has an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor. The lower electrode contains a noble metal crystal having a facet of a plate-shaped crystal formed on a substrate. The facet has a plane given by the crystal face (111) and contains a region having a plane orientation variance angle of not more than 1 DEG by X-ray diffraction.
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申请公布号 |
US5432379(A) |
申请公布日期 |
1995.07.11 |
申请号 |
US19940305284 |
申请日期 |
1994.09.14 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
EGUCHI, KEN;KAWADA, HARUKI;IKEDA, TSUTOMU;TAKIMOTO, KIYOSHI;TAKEDA, TOSHIHIKO |
分类号 |
H01J1/312;C30B7/00;G02F1/1365;H01J1/30;H01J9/02;H01J29/04;H01J31/12;H01J31/15;H01J37/073;H01L45/00;H01L49/02;(IPC1-7):H01L23/48;H01L29/40 |
主分类号 |
H01J1/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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