摘要 |
The method includes the steps of sequentially forming a flat film (4), a first color filter (5), an intermediate film (6), a second color filter (7) and a passivation film (8) on a wafer (1). The second color filter (7) in formed by using dyes of 0.5-1 wt.% of yellow 2p dye, 2 wt.% of acetic acid and pure water under the conditions of the dyeing time of 3-10 minutes and the dyeing temperature of 40-50 deg.C. The first color filter (5) is formed by using dyes of 0.5-1 wt.% of cyanogen 2p dye, 2 wt.% of acetic acid and pure water under the conditions of the dyeing time of 3-10 minutes and the dyeing temperature of 40-50 deg.C. The method uses an ultraviolet photosensitive agent as the passivation film to reduce the exposing time.
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