PROCESS AND DEVICE FOR ELECTROLYTIC PRECIPITATION OF METALLIC LAYERS

摘要

No soluble anodes are used in the electrolytic precipitation of uniform metallic layers having determined physico-mechanical properties, in particular copper layers, as the geometric form of soluble anodes is modified by precipitation and the field line distribution in the electrolytic cells continuously changes. In order to solve the resulting problems, a process is disclosed according to which compounds of a redox system added to the precipitation solution are reacted during precipitation at the insoluble anodes. The resulting compounds draw new metal ions out of part of the reservoir that contains the metal to be precipitated in order to replace the metal ions precipitated from the solution. A process is thus disclosed in which the additive compounds are not destroyed, contrary to the state of the art.