Capacitive acceleration sensor

摘要

The capacitive acceleration sensor is formed from an n-silicon monocrystalline layer (16) on a substrate (12) whereby the layer (16) is etched to provide a seismic mass (10) which can move in a longitudinal direction shown by the arrows and is supported/constrained by the integral suspension arms (11). The four cantilever projections (13) from the mass (10) form the moving plates of a capacitor which with the fixed plates (14) anchored to the substrate (12) are connected externally via the conductor tracks (10). Electrical separation of the capacitor elements is provided by the polycrystalline filling (20) of the grooves (17) and an insulating layer (19) of e.g. silicon dioxide.