Semiconductor material lifetime testing

摘要

The semiconductor material testing involves radiating short-wavelength light for a short time period onto the material surface, generating carriers, and projecting an EM wave, within a mm to sub-mm range, onto the surface. The wave reflected from the semiconductor surface is measured to obtain decay curve for the injected energy carries. The surface lifetime and the lifetime of a thin surface layer is determined based on the decay curve. Pref. the EM energy is in a 30-3000GHz region. A negative bias may be applied to the irradiated surface or its vicinity.