Large area x-ray imager and method of fabrication.

摘要

An X-ray image capture element, has a two-dimensional mosaic of discrete modules (17) over the top surface of a base plate (13), and a continuous radiation-detecting layer (14) over the modules to produce electrical charges from incident X-radiation. Each module has transistors (19) on the top surface of a dielectric substrate (15) resting on the plate. The transistors are partic. thin-film FETs of amorphous, polycrystalline or crystalline Si, or Cd selenide. Each substrate is pref. rectangular and has at least one precision-ground edge to precisely abut that of a similar substrate.