发明名称 Method for fabricating semiconductor light integrated circuit.
摘要 According to a method for fabricating a semiconductor light integrated circuit of the invention, a light waveguide layer and a clad layer are provided on a longitudinal aperture by epitaxial growth technique using a relatively low growth pressure. In contrast with those layers, a quantum well structure layer is selectively provided on the longitudinal aperture by epitaxial growth technique using a relatively high growth pressure. <IMAGE> <IMAGE> <IMAGE>
申请公布号 EP0661783(A1) 申请公布日期 1995.07.05
申请号 EP19940120765 申请日期 1994.12.27
申请人 NEC CORPORATION 发明人 KATO, TOMOAKI, C/O NEC CORPORATION
分类号 H01L21/205;B82Y10/00;B82Y20/00;B82Y40/00;G02F1/025;H01L33/00;H01S5/00;H01S5/026;H01S5/0625;H01S5/20;H01S5/227;H01S5/343 主分类号 H01L21/205
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