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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07169962(A)
申请公布日期
1995.07.04
申请号
JP19940054507
申请日期
1994.02.28
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
KINOSHITA YOSHITAKA;KAWASHIMA YUKIO;NAKAMURA HIDEAKI
分类号
H01L27/04;H01L21/822;H01L27/02;H01L27/06;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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