DETECTOR FOR WAFER WITH METALLIC FILM,申请号JP19930312395-传众专利搜索

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发明名称	DETECTOR FOR WAFER WITH METALLIC FILM
摘要
申请公布号	JPH07169808(A)	申请公布日期	1995.07.04
申请号	JP19930312395	申请日期	1993.12.14
申请人	NEC YAMAGUCHI LTD	发明人	KATO MINORU
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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