| 摘要 |
PURPOSE:To obtain a fixed-quantity polluted sample, in which a pollution element is distributed uniformly in a surface in low concentration, and the manufacture of the standard sample and a production device capable of manufacturing the standard sample with excellent reproducibility. CONSTITUTION:A sample (a wafer) W is mounted on a sample base 2 and moved in the XY directions of a plane, a fixed quantity of polluted liquids are dropped onto the surface of the sample W from a dropping instrument 4 installed to the upper section of the sample W, the dropping operation is repeated at a large number of places in one region of the surface of the sample, and a fixed quantity of the polluted liquids in constant concentration are dropped repeatedly at a large number of places at equal intervals on the surface of the sample, thus manufacturing a sample, in which the droplets of a fixed quantity of the polluted liquids in constant concentration are arranged at a large number of points in a latticed from at regular intervals on the surface. |
