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经营范围
发明名称
SEMICONDUCTOR PROCESSING DEVICE
摘要
申请公布号
JPH07169663(A)
申请公布日期
1995.07.04
申请号
JP19930312192
申请日期
1993.12.13
申请人
NEC CORP
发明人
MORICHIKA YOSHIMITSU
分类号
B08B3/08;H01L21/02;H01L21/677;H01L21/68;(IPC1-7):H01L21/02
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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