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发明名称
POSITION-DETECTING SENSOR IN FINE MOVEMENT
摘要
申请公布号
JPH07167604(A)
申请公布日期
1995.07.04
申请号
JP19930342143
申请日期
1993.12.14
申请人
ONO SOKKI CO LTD
发明人
SAKAI MASAHIKO
分类号
G01B7/00;(IPC1-7):G01B7/00
主分类号
G01B7/00
代理机构
代理人
主权项
地址
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