| 摘要 |
PURPOSE: To easily manufacturing an inexpensive power sensor by at least partially forming a deflection element and a vibrator from silicon and placing a dielectric layer between the deflection element and the vibrator. CONSTITUTION: A vibrator 3 of a power sensor 1 is arranged at a deflection element 2 that is formed as a diaphragm. A structured dielectric layer 4 is arranged between the vibrator 3 and the deflection element 2. The vibrator 3 and the deflection element 2 are structured by a first silicon layer 9 and a second silicon layer 10, respectively. Especially, the deflection element 2 and the vibrator 3 are formed at least partially by silicon, and the dielectric layer 4 is arranged between the deflection element 2 and the vibrator 3, thus improving a power sensor and easily and inexpensively enabling its manufacture.
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