Electrochemical sensor with integrated structure for the measurement of relative concentrations of reactive species

摘要

In an electrochemical sensor, a gas analyzing electrochemical cell is implanted directly on a substrate wafer. The entire wafer is coated with enamel layers except at the places needed for the electrical connections. A fixing part fixes the sensor in a housing in such a way that the electrochemical cell is inside the housing which contains the gas to be analyzed. This fixing part provides imperviousness and prevents the gases from reaching the electrical connections.