Counterbalanced vibratory triaxial angular rate sensor with open loop output

摘要

A sensor for measuring angular rotation rates about three orthogonal axes is based upon sensing Coriolis acceleration forces with a pair of nearly-identical rotors coupled coaxialy by a torsion spring and counter-oscillating in rotation. The torsional oscillator is mounted within a case by means of radial vanes, each comprisig two piezoelectric ceramic plates bonded to a thin metal core responsive to drive signals and providing rotational vibration isolation. The arms of the rotors are designed as piezoelectric open loop accelerometers. Electrodes of selected configurations are mounted to the outer surfaces of the planar members to collect charge indicative of Coriolis accelerations proportional to the angular rotations about the orthogonal axes.