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发明名称
FERROELECTRIC THIN FILM DEVICE
摘要
申请公布号
JPH07169996(A)
申请公布日期
1995.07.04
申请号
JP19930316192
申请日期
1993.12.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAGAO NOBUAKI;TAKEUCHI TAKAYUKI;IIJIMA KENJI;KAWAMURA TATSURO
分类号
G01J1/02;C01G23/00;C01G25/00;H01L37/02;(IPC1-7):H01L37/02
主分类号
G01J1/02
代理机构
代理人
主权项
地址
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