| 摘要 |
<p>PURPOSE:To improve discrimination between an alignment mark and other patterns and to improve precision of alignment by combining alignment marks of different directorities of signal output. CONSTITUTION:An alignment mark is constituted of adjoining alignment marks 11, 12, 13 extending in the same direction, and signal output of the alignment mark 12 has direction which differs from that of signal output of the other alignment marks 11, 13.</p> |
