| 摘要 |
<p>PURPOSE:To prevent the formation of bubbles in a fluid inside a case by forming waveforms from the central part of a diaphragm plate over to the peripheral part thereof and by making a wave height and a pitch larger toward the central part. CONSTITUTION:Silicone oil 16 damping deflection of an acceleration detecting element 15 is sealed in a case 11. When the silicone oil 16 expands or contracts due to a change in temperature, the shape of a diaphragm 11a changes, the capacity of the case 11 changes and absorbs the change in the volume of the oil 16 and thereby occurrence of a disadvantage due to the change in the volume is prevented. In other words, only the shape of the diaphragm 11a changes due to the expansion or contraction of the oil 16 caused by the change in temperature. Since no sponge is used, gas is not produced and no bubble is formed in the oil 16. Accordingly, the output characteristic of the acceleration detecting element 15 is not varied and thus acceleration can be detected accurately.</p> |
