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经营范围
发明名称
ION IMPLANTING DEVICE
摘要
申请公布号
JPH07169433(A)
申请公布日期
1995.07.04
申请号
JP19930342432
申请日期
1993.12.14
申请人
NISSIN ELECTRIC CO LTD
发明人
HIKAWA KAZUNORI
分类号
C23C14/48;H01J37/04;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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